Multi-Axis Geometric Error Measurement for Linear Stages
Measurement Device and Method for Geometric Errors of Linear Stage
Tags: National Cheng Kung University, Taiwan, Industrial Automation & Manufacturing, Electronics & Robotics
This technology is a positioning error measurement system for linear stages that uses geometric optics instead of traditional interference principles. It measures multi-degrees-of-freedom geometric errors, not just positioning errors, by analyzing laser beam deflections on position-sensitive detectors (PSDs). The system consists of a fixed and a moving module, with the latter placed on the linear stage. Its ability to measure multiple geometric errors simultaneously reduces measurement time and offers a cost-effective alternative to laser interferometers. Applications include machine tool calibration in manufacturing facilities.
IP Type or Form Factor: Patent Granted; Device; Platform
TRL: Not specified
Industry or Tech Area: Manufacturing Technology; Photonics & Optoelectronics
